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The back grinding process involves using a diamond-resin bonded grinding wheel to remove the silicon material from the back of a silicon wafer. Using a grinding wheel is highly effective, and faster and less expensive than chemical-mechanical processes, and is used to remove the bulk of substrate material prior to final finish grind, polish or chemical etch.

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The back grinding process involves using a diamond-resin bonded grinding wheel to remove the silicon material from the back of a silicon wafer. Using a grinding wheel is highly effective, and faster and less expensive than chemical-mechanical processes, and is used to remove the bulk of substrate material prior to final finish grind, polish or chemical etch.

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The machine picks up the wafer from its backside (untaped side) with a robotic arm, which positions the wafer for backgrinding. The backgrinding process is automatically accomplished by a grinding wheel, following a precise set of parameters to ensure proper backgrinding.

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Wafer backgrinding is a semiconductor device fabrication step during which wafer thickness is reduced to allow stacking and high-density packaging of integrated circuits (IC).. ICs are produced on semiconductor wafers that undergo a multitude of processing steps. The silicon wafers predominantly used today have diameters of 200 and 300 mm. They are roughly 750 μm thick to ensure a minimum …